Browsing Institutt for elektroniske systemer by Journals "Journal of microelectromechanical systems"
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On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
(Peer reviewed; Journal article, 2021)Lifetime and reliability in realistic operating conditions are important parameters for the application of thin-film piezoelectric microelectromechanical systems (piezoMEMS) based on lead zirconate titanate (PZT). Humidity ...