On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators
Grayson, Michael; Krueper, Greg; Xu, Bo; Zohrabi, Mo; Hjelme, Dag Roar; Gopinath, Juliet; Park, Wounjhang
Journal article, Peer reviewed
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Date
2023Metadata
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Abstract
We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 µm. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced 1.5 dB/cm higher propagation losses at 3.6 µm due to C-H bond absorption. We use fabricated waveguides to detect an aromatic aldehyde dissolved in a non-polar solvent with a limit of detection of 1.09 µmol/mL. We then reduce this detection limit to 0.25 µmol/mL using the enhancement produced by a chalcogenide ring resonator.