dc.contributor.author | Grayson, Michael | |
dc.contributor.author | Krueper, Greg | |
dc.contributor.author | Xu, Bo | |
dc.contributor.author | Zohrabi, Mo | |
dc.contributor.author | Hjelme, Dag Roar | |
dc.contributor.author | Gopinath, Juliet | |
dc.contributor.author | Park, Wounjhang | |
dc.date.accessioned | 2023-09-29T09:08:57Z | |
dc.date.available | 2023-09-29T09:08:57Z | |
dc.date.created | 2023-01-04T13:41:21Z | |
dc.date.issued | 2023 | |
dc.identifier.citation | Optics Express. 2023, 31 (2), 877-889. | en_US |
dc.identifier.issn | 1094-4087 | |
dc.identifier.uri | https://hdl.handle.net/11250/3093011 | |
dc.description.abstract | We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 µm. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced 1.5 dB/cm higher propagation losses at 3.6 µm due to C-H bond absorption. We use fabricated waveguides to detect an aromatic aldehyde dissolved in a non-polar solvent with a limit of detection of 1.09 µmol/mL. We then reduce this detection limit to 0.25 µmol/mL using the enhancement produced by a chalcogenide ring resonator. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | Optica | en_US |
dc.title | On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators | en_US |
dc.title.alternative | On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators | en_US |
dc.type | Journal article | en_US |
dc.type | Peer reviewed | en_US |
dc.description.version | publishedVersion | en_US |
dc.rights.holder | © 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement | en_US |
dc.source.pagenumber | 877-889 | en_US |
dc.source.volume | 31 | en_US |
dc.source.journal | Optics Express | en_US |
dc.source.issue | 2 | en_US |
dc.identifier.doi | 10.1364/OE.476186 | |
dc.identifier.cristin | 2100550 | |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 2 | |