Limitations on control performance in the Czochralski crystal growth process using bright ring measurement as a controlled variable
| dc.contributor.author | Bukhari, Halima Zahra | |
| dc.contributor.author | Hovd, Morten | |
| dc.contributor.author | Winkler, Jan | |
| dc.date.accessioned | 2020-01-10T12:41:03Z | |
| dc.date.available | 2020-01-10T12:41:03Z | |
| dc.date.created | 2019-12-16T20:24:21Z | |
| dc.date.issued | 2019 | |
| dc.identifier.citation | IFAC-PapersOnLine. 2019, 52 (14), 129-134. | nb_NO |
| dc.identifier.issn | 2405-8963 | |
| dc.identifier.uri | http://hdl.handle.net/11250/2635715 | |
| dc.description.abstract | This paper develops a dynamical model for crystal diameter in the Czochralski process for production of monocrystalline silicon. The model combines simplified crystal growth dynamics with rigorous ray tracing to describe the camera image used for diameter control, and it is demonstrated that the resulting model captures the so-called measurement anomaly that represents a key performance limitation for crystal diameter control. | nb_NO |
| dc.description.abstract | Limitations on control performance in the Czochralski crystal growth process using bright ring measurement as a controlled variable | nb_NO |
| dc.language.iso | eng | nb_NO |
| dc.publisher | International Federation of Automatic Control (IFAC) | nb_NO |
| dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internasjonal | |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/deed.no | |
| dc.title | Limitations on control performance in the Czochralski crystal growth process using bright ring measurement as a controlled variable | nb_NO |
| dc.type | Journal article | nb_NO |
| dc.type | Peer reviewed | nb_NO |
| dc.description.version | publishedVersion | nb_NO |
| dc.source.pagenumber | 129-134 | nb_NO |
| dc.source.volume | 52 | nb_NO |
| dc.source.journal | IFAC-PapersOnLine | nb_NO |
| dc.source.issue | 14 | nb_NO |
| dc.identifier.doi | https://doi.org/10.1016/j.ifacol.2019.09.176 | |
| dc.identifier.cristin | 1761534 | |
| dc.relation.project | Norges forskningsråd: 256806/O20 | nb_NO |
| dc.description.localcode | © 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. | nb_NO |
| cristin.unitcode | 194,63,25,0 | |
| cristin.unitname | Institutt for teknisk kybernetikk | |
| cristin.ispublished | true | |
| cristin.fulltext | original | |
| cristin.qualitycode | 1 |
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