Blar i Institutt for elektroniske systemer på tidsskrift "Journal of Vacuum Science & Technology B"

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    • Plasma-assisted oxide removal from p-type GaSb for low resistivity ohmic contacts 

      Tran, Thanh-Nam; Patra, Saroj Kumar; Breivik, Magnus; Fimland, Bjørn-Ove (Journal article, 2015)
      The effect of several plasma-assisted oxide removal techniques prior to metallization of p-type GaSb was investigated. Compared to conventional chemical methods, the plasma-assisted oxide removal resulted in significant ...