Blar i Institutt for elektroniske systemer på forfatter "Xu, Bo"
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On-chip mid-infrared optical sensing with GeSbSe waveguides and resonators
Grayson, Michael; Krueper, Greg; Xu, Bo; Zohrabi, Mo; Hjelme, Dag Roar; Gopinath, Juliet; Park, Wounjhang (Journal article; Peer reviewed, 2023)We fabricated single mode Ge28Sb12Se60 waveguides and resonators using e-beam lithography and achieved a propagation loss of 3.88 dB/cm at 3.66 µm. We compared BCl3 and CHF3 etch chemistries and determined CHF3 produced ...