1.9 micron Tm3+-doped germanate fiber laser source for Si-processing
Dvoyrin, Vladislav; Sorokina, Irina T; Okhotnikov, Oleg; Mashinsky, Valery M.; Ischakova, Lyudmila D.; Dianov, Evgenii M; Khopin, Vladimir F.; Guryanov, Aleksey N.
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2011Metadata
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10.1364/FILAS.2011.FThE8Abstract
We report development of a novel Tm3+ -doped fiber laser source at 1.86 μm based on highly nonlinear 55GeO2-45SiO2 dispersion shifted fiber, applicable to 3D-volume microprocessing of Si.