dc.contributor.author | Tran, Thanh-Nam | |
dc.contributor.author | Patra, Saroj Kumar | |
dc.contributor.author | Breivik, Magnus | |
dc.contributor.author | Fimland, Bjørn-Ove | |
dc.date.accessioned | 2017-11-06T10:57:14Z | |
dc.date.available | 2017-11-06T10:57:14Z | |
dc.date.created | 2015-12-04T20:07:06Z | |
dc.date.issued | 2015 | |
dc.identifier.citation | Journal of Vacuum Science & Technology B. 2015, 33:061220 (6), . | nb_NO |
dc.identifier.issn | 1071-1023 | |
dc.identifier.uri | http://hdl.handle.net/11250/2464185 | |
dc.description.abstract | The effect of several plasma-assisted oxide removal techniques prior to metallization of p-type GaSb was investigated. Compared to conventional chemical methods, the plasma-assisted oxide removal resulted in significant improvement of the specific contact resistivities, obtained from transfer length method measurements. Very low specific contact resistivities of less than 5108 X cm2 were observed after surface pretreatment by H2/Ar sputter etching and low-ion-energy argon irradiation. By eliminating sample exposure to air, in situ Ar irradiation becomes a promising technique for high performance GaSb-based semiconductor diode lasers. | nb_NO |
dc.language.iso | eng | nb_NO |
dc.publisher | American Vacuum Society | nb_NO |
dc.title | Plasma-assisted oxide removal from p-type GaSb for low resistivity ohmic contacts | nb_NO |
dc.type | Journal article | nb_NO |
dc.description.version | acceptedVersion | nb_NO |
dc.source.pagenumber | 4 | nb_NO |
dc.source.volume | 33:061220 | nb_NO |
dc.source.journal | Journal of Vacuum Science & Technology B | nb_NO |
dc.source.issue | 6 | nb_NO |
dc.identifier.doi | 10.1116/1.4935883 | |
dc.identifier.cristin | 1297250 | |
dc.relation.project | Norges forskningsråd: 197411 | nb_NO |
dc.relation.project | Norges forskningsråd: 177610 | nb_NO |
dc.description.localcode | © 2015. This is the authors’ accepted and refereed manuscript to the article | nb_NO |
cristin.unitcode | 194,63,35,0 | |
cristin.unitname | Institutt for elektroniske systemer | |
cristin.ispublished | true | |
cristin.fulltext | postprint | |
cristin.qualitycode | 0 | |