Originalversjon
Journal of Micromechanics and Microengineering (JMM). 2022, 32 (7), .
10.1088/1361-6439/ac6ebf
Utgiver
IOP Publishing
Tidsskrift
Journal of Micromechanics and Microengineering (JMM)
Opphavsrett
This article will not be available until June 21, 2023 due to publisher embargo - This accepted manuscript is made available under the CC-BY-NC-ND 4.0 license