Deposition of Thin Film Electrolyte by Pulsed Laser Deposition (PLD) for micro-SOFC Development

Abstract

Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance.Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.