Deposition of Thin Film Electrolyte by Pulsed Laser Deposition (PLD) for micro-SOFC Development
Master thesis
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http://hdl.handle.net/11250/249102Utgivelsesdato
2012Metadata
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Sammendrag
Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance.Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.