dc.contributor.author | Hu, Yu | |
dc.contributor.author | Schøn, Hendrik | |
dc.contributor.author | Øvrelid, Eivind Johannes | |
dc.contributor.author | Nielsen, Øyvind | |
dc.contributor.author | Arnberg, Lars | |
dc.date.accessioned | 2015-09-21T13:20:10Z | |
dc.date.accessioned | 2016-04-21T08:00:09Z | |
dc.date.available | 2015-09-21T13:20:10Z | |
dc.date.available | 2016-04-21T08:00:09Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | AIP Advances 2012, 2(3) | nb_NO |
dc.identifier.issn | 2158-3226 | |
dc.identifier.uri | http://hdl.handle.net/11250/2386625 | |
dc.description.abstract | A new method to map the thermal donor concentration in silicon wafers using carrier
density imaging is presented. A map of the thermal donor concentration is extracted
with high resolution from free carrier density images of a silicon wafer before and
after growth of thermal donors. For comparison, free carrier density mapping is
also performed using the resistivity method together with linear interpolation. Both
methods reveal the same distribution of thermal donors indicating that the carrier
density imaging technique can be used to map thermal donor concentration. The
interstitial oxygen concentration can also be extracted using the new method in
combination withWijaranakula’s model. As part of this work, the lifetime at medium
injection level is correlated to the concentration of thermal donors in the as-grown
silicon wafer. The recombination rate is found to depend strongly on the thermal
donor concentration except in the P-band region. | nb_NO |
dc.language.iso | eng | nb_NO |
dc.publisher | American Institute of Physics | nb_NO |
dc.rights | Navngivelse 3.0 Norge | * |
dc.rights.uri | http://creativecommons.org/licenses/by/3.0/no/ | * |
dc.title | Investigating thermal donors in n-type Cz silicon with carrier density imaging | nb_NO |
dc.type | Journal article | nb_NO |
dc.type | Peer reviewed | nb_NO |
dc.date.updated | 2015-09-21T13:20:10Z | |
dc.source.volume | 2 | nb_NO |
dc.source.journal | AIP Advances | nb_NO |
dc.source.issue | 3 | nb_NO |
dc.identifier.doi | 10.1063/1.4754276 | |
dc.identifier.cristin | 991276 | |
dc.description.localcode | Copyright 2012 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. | nb_NO |