Blar i Institutt for maskinteknikk og produksjon på tidsskrift "Measurement science and technology"
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A measuring method for micro force based on MEMS planar torsional spring
(Peer reviewed; Journal article, 2020)In order to measure the micro force in a micro-nano device, a new measuring method for micro force is introduced. In this paper, a measuring system based on a micro-electro-mechanical systems (MEMS) planar torsional spring ...