Blar i Institutt for energi og prosessteknikk på emneord "Raidation tolerance"
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High aspect ratio deep RIE for novel 3D radiation sensors in high energy physics applications
(Journal article; Peer reviewed, 2009)3D detectors with electrodes penetrating through the entire silicon substrate have many advantages over conventional planar silicon technology, for example, high radiation tolerance. High aspect ratio through-wafer holes ...