dc.contributor.author | Lid, Markus Joakim | |
dc.contributor.author | Bin Afif, Abdulla | |
dc.contributor.author | Torgersen, Jan | |
dc.contributor.author | Prinz, Fritz | |
dc.date.accessioned | 2022-04-05T09:20:19Z | |
dc.date.available | 2022-04-05T09:20:19Z | |
dc.date.created | 2022-01-20T11:38:35Z | |
dc.date.issued | 2021 | |
dc.identifier.citation | Procedia Structural Integrity. 2021, 266-273. | en_US |
dc.identifier.issn | 2452-3216 | |
dc.identifier.uri | https://hdl.handle.net/11250/2989861 | |
dc.description.abstract | Focused Ion Beams (FIB) systems are employed for their ability to manipulate and remove material on the nanoscale for creating complex structures. By splitting the milling job into multiple sub-patterns, consisting of a bulk milling pattern, and one or more finish pass patterns that follow the contours of the milling geometry, we show that one can counteract the effect of re-deposition on the sidewalls. Our tests showed a reduction in sidewall angle from 96◦to 92.5◦using identical beam conditions and nearly the same processing time employing only one finish pass pattern. Further, by assigning different beam currents to three different sub-patterns, we were able to reduce angles to 92◦, while cutting total milling time by 10%. Improving our strategy may render FIB systems a potential as effective nanofabrication tools applicable beyond creating prototypes and lamellae for material characterization. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | Elsevier | en_US |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/deed.no | * |
dc.title | Finish-pass strategy to improve sidewall angle and processing time in FIB milled structures | en_US |
dc.type | Peer reviewed | en_US |
dc.type | Journal article | en_US |
dc.description.version | publishedVersion | en_US |
dc.source.pagenumber | 266-273 | en_US |
dc.source.journal | Procedia Structural Integrity | en_US |
dc.identifier.doi | https://doi.org/10.1016/j.prostr.2021.12.038 | |
dc.identifier.cristin | 1985976 | |
dc.relation.project | Norges forskningsråd: 295864 | en_US |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 1 | |