dc.contributor.author | Matkivskyi, Vladyslav | |
dc.contributor.author | Lee, Youngseok | |
dc.contributor.author | Seo, Hyeon Sik | |
dc.contributor.author | Lee, Doh-Kwon | |
dc.contributor.author | Park, Jong-Keuk | |
dc.contributor.author | Kim, Inho | |
dc.date.accessioned | 2022-03-15T10:24:54Z | |
dc.date.available | 2022-03-15T10:24:54Z | |
dc.date.created | 2021-11-24T12:25:18Z | |
dc.date.issued | 2021 | |
dc.identifier.citation | Current applied physics. 2021, 32 98-105. | en_US |
dc.identifier.issn | 1567-1739 | |
dc.identifier.uri | https://hdl.handle.net/11250/2985221 | |
dc.description.abstract | This work is dedicated to the study of electronic-beam (e-beam) evaporated titanium oxide (TiOx) contact for polycrystalline silicon hetero-junction solar cells. A TiOx material obtained by e-beam evaporation method is suggested as a possible alternative to the atomic layer deposition (ALD) process. The purpose is to achieve corresponding passivation efficiency between e-beam evaporation of TiOx and the ALD method. However, the TiOx in question achieved a relatively low passivation performance of Seff = 113 cm−1 in comparison to the reported ALD results. Nonetheless, as e-beam evaporation is well-established and an environmentally friendly deposition technology, e-beam evaporated TiOx passivation layer has potential for improvement. What is clearly demonstrated in our work is how such an improvement in contact resistance dropped from >55 Ω/cm2 to 2.29 Ω/cm2. Indeed, our study established a correlation between the main process parameters of e-beam evaporation and their influence on the quality of electron selective TiOx layer. Moreover, we reveal a possible scenario for the implementation of e-beam evaporated Titanium oxide as electron selective contact for asymmetrical hetero-junction solar cells. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | Elsevier | en_US |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/deed.no | * |
dc.title | Electronic-beam evaporation processed titanium oxide as an electron selective contact for silicon solar cells | en_US |
dc.type | Journal article | en_US |
dc.type | Peer reviewed | en_US |
dc.description.version | publishedVersion | en_US |
dc.source.pagenumber | 98-105 | en_US |
dc.source.volume | 32 | en_US |
dc.source.journal | Current applied physics | en_US |
dc.identifier.doi | 10.1016/j.cap.2021.10.005 | |
dc.identifier.cristin | 1958348 | |
cristin.ispublished | true | |
cristin.fulltext | original | |
cristin.qualitycode | 1 | |