Blar i NTNU Open på forfatter "Dahl-Hansen, Runar Plünnecke"
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Reliability of piezoelectric microelectomecanical systems in humid conditions
Dahl-Hansen, Runar Plünnecke (Doctoral theses at NTNU;2020:125, Doctoral thesis, 2020)Since its discovery, silicon-based microelectromechanical systems (MEMS) have had a significant impact on the technological development of sensors and actuators. Using piezoelectric materials deposited as thin-films on a ...