Blar i NTNU Open på forfatter "Vedum, Jon"
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On the effect of water-induced degradation of thin-film piezoelectric microelectromechanical systems
Dahl-Hansen, Runar Plunnecke; Tyholdt, Frode; Gjessing, Jo; Vogl, Andreas; Wittendorp, Paul; Vedum, Jon; Tybell, Per Thomas Martin (Peer reviewed; Journal article, 2021)Lifetime and reliability in realistic operating conditions are important parameters for the application of thin-film piezoelectric microelectromechanical systems (piezoMEMS) based on lead zirconate titanate (PZT). Humidity ...