Blar i NTNU Open på forfatter "Ueland, Åsmund Stenhaug"
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Patterning of the Oxide Mask for Nanowire Growth by Dry Etching
Ueland, Åsmund Stenhaug (Master thesis, 2015)In this master s thesis it is investigated how inductively coupled plasma reactive-ion etching, in combination with hydrofluoric acid wet etching, can be used to produce consistent and reliable nanoscaled holes with a high ...