Blar i NTNU Open på forfatter "Li, Zhengyu"
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Numerical modelling of a Czochralski furnace with active cooling jacket - Optimization of quality and througput
Li, Zhengyu (Master thesis, 2015)In the single crystal silicon Czochlarski process, pull rate has a great impact on its production. More and more people put their eyes on optimizing the structure of Cz furnace to increase the pull rate, but experiments ...