Browsing NTNU Open by Author "Pengel, Stefanie"
Now showing items 1-1 of 1
-
10 nm deep, sub-nanoliter fluidic nanochannels on germanium for attenuated total reflection infrared (ATR-IR) spectroscopy
Sriram, K.K.; Nayak, Simantini; Pengel, Stefanie; Chou, Chia-Fu; Erbe, Andreas (Journal article; Peer reviewed, 2017)The fabrication of sub-nanoliter fluidic channels is demonstrated, with merely 10 nm depth on germanium, using conventional semiconductor device fabrication methods and a polymer assisted room-temperature sealing method. ...