Browsing NTNU Open by Author "Bin Afif, Abdulla"
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Finish-pass strategy to improve sidewall angle and processing time in FIB milled structures
Lid, Markus Joakim; Bin Afif, Abdulla; Torgersen, Jan; Prinz, Fritz (Peer reviewed; Journal article, 2021)Focused Ion Beams (FIB) systems are employed for their ability to manipulate and remove material on the nanoscale for creating complex structures. By splitting the milling job into multiple sub-patterns, consisting of a ...