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dc.contributor.authorDahl-Hansen, Runar Plunnecke
dc.contributor.authorPolfus, Jonathan Marc
dc.contributor.authorVøllestad, Einar
dc.contributor.authorAkkopru-Akgun, Betul
dc.contributor.authorDenis, Lyndsey
dc.contributor.authorColeman, Kathleen
dc.contributor.authorTyholdt, Frode
dc.contributor.authorTrolier-Mckinstry, Susan E
dc.contributor.authorTybell, Per Thomas Martin
dc.date.accessioned2021-03-08T09:50:58Z
dc.date.available2021-03-08T09:50:58Z
dc.date.created2020-09-29T13:33:29Z
dc.date.issued2020
dc.identifier.issn0021-8979
dc.identifier.urihttps://hdl.handle.net/11250/2732091
dc.description.abstractThe ambient humidity significantly accelerates the degradation of lead zirconate titanate (PZT) films in microelectromechanical systems; the cause of such degradation is under debate. Here, it is shown that the degradation of chemical solution derived PZT thin-films in humid conditions is driven by the system's electrochemical activity toward water electrolysis. The layer stacks with Pt-based electrodes exhibited a faster degradation rate owing to their higher electrocatalytic activity compared to Au. A degradation model is proposed based on the electrolysis of liquid or gaseous H2O, involving the evolution of oxygen and hydrogen gas at the top and bottom electrodes. Degradation proceeds above the threshold voltage for a given electrode system and is driven by the evolution and pressure build-up of gaseous species at the PZT/electrode interfaces. The pressure build-up causes film cracking, delamination of the film and electrodes, electrothermal breakdown events, and eventually time-dependent dielectric breakdown. Significantly larger post-breakdown crater sizes in humid than in dry conditions suggests that larger cracks through which dielectric breakdown through humidified air can occur. Overall, these effects are shown to cause sample failure up to six orders of magnitude of time earlier than for operation in dry conditions. Thus, in order to improve the resilience of thin-film systems in humid conditions, it is imperative to protect the electrochemically active electrode components of the device. ACKNOWen_US
dc.language.isoengen_US
dc.publisherAmerican Institute of Physicsen_US
dc.titleElectrochemically driven degradation of chemical solution deposited ferroelectric thin-films in humid ambienten_US
dc.typePeer revieweden_US
dc.typeJournal articleen_US
dc.description.versionacceptedVersionen_US
dc.source.volume127en_US
dc.source.journalJournal of Applied Physicsen_US
dc.identifier.doi10.1063/5.0003989
dc.identifier.cristin1834916
dc.relation.projectNorges forskningsråd: 247781en_US
dc.description.localcodeThis is the authors’ accepted and refereed manuscript to the article. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Journal of Applied Physics and may be found at http://dx.doi.org/10.1063/5.0003989en_US
cristin.ispublishedtrue
cristin.fulltextpostprint
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