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dc.contributor.authorDahl-Hansen, Runar Plunnecke
dc.contributor.authorTyholdt, Frode
dc.contributor.authorTybell, Per Thomas Martin
dc.date.accessioned2019-03-04T12:35:38Z
dc.date.available2019-03-04T12:35:38Z
dc.date.created2018-11-16T00:06:58Z
dc.date.issued2018
dc.identifier.citationProceedings of the IEEE. 2018, 1-4.nb_NO
dc.identifier.issn0018-9219
dc.identifier.urihttp://hdl.handle.net/11250/2588486
dc.description.abstractThe number of application areas for piezoelectric micro electromechanical systems based on PZT have increased rapidly over the years. Thus, to continue the development towards commercial deployment, characterizing lifetime and reliability during operation in realistic and harsh environments is important. Such environments are demanding for piezoMEMS devices since they often involve high humidity levels and elevated temperatures which gives rise to complex degradation. To address how such conditions affects device performance we combined optical and electrical measurements to elucidate the degradation of a PZT-based thin-film piezoelectric MEMS micromirror during temperature-humidity-cycling tests. As a test structure, 1 μm PbZr 0.40 Ti 0.60 O 3 on a 10 nm LaNiO 3 buffer-layer, were deposited by pulsed laser deposition on platinized Silicon-on-Insulator wafers. A 250 nm Au/TiW top electrode was deposited by DC-sputtering before structuring the final device. The micro mirrors were unipolarly actuated with a signal of 20 V peak-to-peak at a frequency of 1.5 kHz in an ambient with constant vapor concentration of 22 g/m 3 for device temperatures between 25 o C and 175 o C. Humidity-related degradation was manifested as local breakdown events and pinholes on top of and along the edges of the used electrodes. This had a strong effect on device performance and preceded degradation due to polarization-fatigue at all temperatures. Also, both the initial piezoelectric response and number of cycles to device failure increased with increasing substratenb_NO
dc.language.isoengnb_NO
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)nb_NO
dc.titlePerformance and reliability of PZT-based piezoelectric micromirrors operated in realistic environmentsnb_NO
dc.typeJournal articlenb_NO
dc.typePeer reviewednb_NO
dc.description.versionacceptedVersionnb_NO
dc.subject.nsiVDP::Matematikk og naturvitenskap: 400nb_NO
dc.subject.nsiVDP::Mathematics and natural scienses: 400nb_NO
dc.source.pagenumber1-4nb_NO
dc.source.journalProceedings of the IEEEnb_NO
dc.identifier.doi10.1109/ISAF.2018.8463243
dc.identifier.cristin1631226
dc.relation.projectNorges forskningsråd: 247781nb_NO
dc.description.localcode© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.nb_NO
cristin.unitcode194,63,35,0
cristin.unitnameInstitutt for elektroniske systemer
cristin.ispublishedtrue
cristin.fulltextoriginal
cristin.qualitycode2


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