Strategy for reliable strain measurement in InAs/GaAs materials from high-resolution Z-contrast STEM images
Vatanparast, Maryam; Vullum, Per Erik; Nord, Magnus Kristofer; Zuo, Jian Min; Reenaas, Turid Worren; Holmestad, Randi
Journal article, Peer reviewed
Published version
Permanent lenke
http://hdl.handle.net/11250/2460660Utgivelsesdato
2017Metadata
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- Institutt for fysikk [2703]
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Originalversjon
10.1088/1742-6596/902/1/012021Sammendrag
Geometric phase analysis (GPA), a fast and simple Fourier space method for strain analysis, can give useful information on accumulated strain and defect propagation in multiple layers of semiconductors, including quantum dot materials. In this work, GPA has been applied to high resolution Z-contrast scanning transmission electron microscopy (STEM) images. Strain maps determined from different g vectors of these images are compared to each other, in order to analyze and assess the GPA technique in terms of accuracy. The SmartAlign tool has been used to improve the STEM image quality getting more reliable results. Strain maps from template matching as a real space approach are compared with strain maps from GPA, and it is discussed that a real space analysis is a better approach than GPA for aberration corrected STEM images.