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Metallization scheme and release methods for fabrication of RF MEMS switches

dc.contributor.authorSaha, Shimul Chandra
dc.contributor.authorSæther, Trond
dc.contributor.authorJensen, Geir uri
dc.contributor.authorPoppe, Erik
dc.contributor.authorSagberg, Håkon
dc.date.accessioned2017-07-06T07:40:13Z
dc.date.available2017-07-06T07:40:13Z
dc.date.created2008-01-14T14:59:28Z
dc.date.issued2007
dc.identifier.citationMetallization scheme and release methods for fabrication of RF MEMS switches. I: Proceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007).nb_NO
dc.identifier.isbn9-999-99999-9
dc.identifier.urihttp://hdl.handle.net/11250/2448008
dc.language.isoengnb_NO
dc.relation.ispartofProceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007)
dc.titleMetallization scheme and release methods for fabrication of RF MEMS switchesnb_NO
dc.typeChapternb_NO
dc.typePeer reviewed
dc.description.versionpublishedVersionnb_NO
dc.source.pagenumber773-774nb_NO
dc.identifier.cristin50781
cristin.unitcode194,63,35,0
cristin.unitnameInstitutt for elektronikk og telekommunikasjon
cristin.ispublishedtrue
cristin.fulltextoriginal


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