RF MEMS Switches and Switch Circuits: Modeling of RF MEMS switches and development of RF MEMS capacitive switches and MEMS tunable filters
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Has partsSaha, Shimul Chandra; Sagberg, Håkon; Poppe, Erik; Jensen, Geir U; Fjeldly, Tor A; Sæther, Trond. Tuning of resist slope with hard-baking parameters and release methods of extra hard photoresist for RF MEMS switches. Journal of Sensor and Actuators A: Phys.. 143(2): 452-461, 2008.
Saha, Shimul Chandra. The measurement of S parameters of the RF MEMS switches fabricated in SINTEF MiNa Lab.