Blar i NTNU Open på forfatter "Wu, Shimeng"
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Remaining useful life prediction for ion etching machine cooling system using deep recurrent neural network-based approaches
Wu, Shimeng; Jiang, Yuchen; Luo, Hao; yin, shen (Peer reviewed; Journal article, 2021)The cooling system called flowcool is an important part of the ion mill etching (IME) machine. In the case of the cooling system failure during operation, it will lead to significant impacts on the final quality of wafers. ...