• Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors 

      Provine, J; Schindler, Peter; Torgersen, Jan; Hyo Jin, Kim; Karnthaler, Hans-Peter; Prinz, Fritz (Journal article; Peer reviewed, 2016)
      Tetrakisdimethylamido (TDMA) based precursors are commonly used to deposit metal oxides such as TiO2, ZrO2, and HfO2 by means of chemical vapor deposition and atomic layer deposition (ALD). Both thermal and plasma enhanced ...
    • Direct Integration of Strained-Pt Catalysts into Proton-Exchange-Membrane Fuel Cells with Atomic Layer Deposition 

      Xu, Shicheng; Wang, Zhaoxuan; Dull, Sam; Liu, Yunzhi; Lee, Dong Un; Pacheco, Lezama; Orazov, Marat; Vullum, Per Erik; Dadlani, Anup; Vinogradova, Olga; Schindler, Peter; Tam, Qizhan; Schladt, Thomas; Mueller, Jonathan E.; Kirsch, Sebastian; Huebner, Gerold; Higgins, Drew; Torgersen, Jan; Viswanathan, Venkatasubramanian; Jaramillo, Thomas F; Prinz, Friedrich (Peer reviewed; Journal article, 2021)
      The design and fabrication of lattice-strained platinum catalysts achieved by removing a soluble core from a platinum shell synthesized via atomic layer deposition, is reported. The remarkable catalytic performance for the ...
    • Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor 

      Acharya, Shinjita; Torgersen, Jan; Yongmin, Kim; Joonsuk, Park; Schindler, Peter; Dadlani, Anup; Winterkorn, Martin; Xu, Shicheng; Walch, Stephen; Usui, Takane; Schildknecht, Christian; Fritz, Prinz (Journal article; Peer reviewed, 2016)
      Barium oxide (BaO) is a critical component for a number of materials offering high dielectric constants, high proton conductivity as well as potential applicability in superconductivity. For these properties to keep pace ...