Browsing NTNU Open by Author "Krondorfer, Rudolf H."

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On Packaging of MEMS. Simulation of Transfer Moulding and Packaging Stress and their Effect on a Family of piezo-resistive Pressure Sensors

Krondorfer, Rudolf H. (Dr. ingeniøravhandling, 0809-103X; 2003:112, Doctoral thesis, 2004)

Micro Electro Mechanical Systems (MEMS) produced to date include IR detectors, accelerometers, pressure sensors, micro lenses, actuators, chemical sensors, gear drives, RF devices, optical processor chips, micro robots and ...