Browsing NTNU Open by Author "Kasik, Martin"

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Influence of polycrystalline material on crater shape optimization and roughness using low power/low-pressure direct-current glow discharge mass spectrometry

Paudel, Gagan; Khromov, Sergey; Kasik, Martin; Roven, Hans Jørgen; Di Sabatino Lundberg, Marisa (Peer reviewed; Journal article, 2020)

Depth profiling is an attractive approach for analysis of non-homogeneous samples and layered materials. This application requires an optimum sputtered crater profile, which means a flat crater bottom with steep walls and ...