Blar i NTNU Open på forfatter "Cheng, Xuemei"

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    • Surface passivation properties of HfO2 thin film on n-Type crystalline Si 

      Cheng, Xuemei; Repo, Paivikki; Haug, Halvard; Perros, Alexander Pyymaki; Marstein, Erik Stensrud; Di Sabatino Lundberg, Marisa; Savin, Hele (Journal article, 2017)
      Atomic layer deposited hafnium oxide is shown to provide good surface passivation of low resistivity, n-type crystalline Si wafers after a low temperature anneal. The surface passivation is related to a fixed negative ...

    • Temporal stability of a-Si:H and a-SiNx:H on crystalline silicon wafers 

      Cheng, Xuemei; Marstein, Erik Stensrud; You, Chang Chuan; Haug, Halvard; Di Sabatino Lundberg, Marisa (Journal article; Peer reviewed, 2017)
      The temporal stability of single layer thin films of hydrogenated amorphous silicon (a-Si:H) and silicon nitride (a-SiNx:H) passivated crystalline silicon wafers have been investigated over 18 months. The thin films were ...