dc.contributor.author | Rahmanpour, Parsa | |
dc.contributor.author | Bones, John Atle | |
dc.contributor.author | Hovd, Morten | |
dc.contributor.author | Gravdahl, Jan Tommy | |
dc.date.accessioned | 2017-11-08T14:57:48Z | |
dc.date.available | 2017-11-08T14:57:48Z | |
dc.date.created | 2014-01-06T13:31:06Z | |
dc.date.issued | 2013 | |
dc.identifier.citation | Elsevier IFAC Publications / IFAC Proceedings series. 2013, 10 (1), 523-528. | nb_NO |
dc.identifier.issn | 1474-6670 | |
dc.identifier.uri | http://hdl.handle.net/11250/2465041 | |
dc.description.abstract | The Czochralski process is the only method used commercially for production of monocrystalline silicon for semiconductor and solar cell applications. This paper explores the use of mathematical modeling as an aid in estimation of system state variables in the standard Czochralski process. A state-space model of the process is presented, describing the dynamics of the crystal radius and meniscus height with crystal radius as measured output. For the purpose of estimating the actual crystal radius during growth, three types of state estimators are developed based on the state-space model; the Kalman lter, the extended Kalman lter and the unscented Kalman lter. It is found that the latter two provide highly accurate state estimates with excellent noise suppression. | nb_NO |
dc.language.iso | eng | nb_NO |
dc.publisher | Elsevier | nb_NO |
dc.rights | Attribution-NonCommercial-NoDerivatives 4.0 Internasjonal | * |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/deed.no | * |
dc.title | Linear and Nonlinear State Estimation in the Czochralski Process | nb_NO |
dc.type | Journal article | nb_NO |
dc.type | Peer reviewed | nb_NO |
dc.description.version | acceptedVersion | nb_NO |
dc.source.pagenumber | 523-528 | nb_NO |
dc.source.volume | 10 | nb_NO |
dc.source.journal | Elsevier IFAC Publications / IFAC Proceedings series | nb_NO |
dc.source.issue | 1 | nb_NO |
dc.identifier.doi | 10.3182/20131218-3-IN-2045.00043 | |
dc.identifier.cristin | 1084249 | |
dc.relation.project | Norges forskningsråd: 192427 | nb_NO |
dc.description.localcode | © 2016. This is the authors’ accepted and refereed manuscript to the article. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ | nb_NO |
cristin.unitcode | 194,63,25,0 | |
cristin.unitname | Institutt for teknisk kybernetikk | |
cristin.ispublished | true | |
cristin.fulltext | postprint | |
cristin.qualitycode | 0 | |