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Publikasjoner fra CRIStin - NTNU
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Publikasjoner fra CRIStin - NTNU
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Metallization scheme and release methods for fabrication of RF MEMS switches
Saha, Shimul Chandra
;
Sæther, Trond
;
Jensen, Geir uri
;
Poppe, Erik
;
Sagberg, Håkon
Chapter, Peer reviewed
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SINTEF+S4624.pdf (295.7Kb)
URI
http://hdl.handle.net/11250/2448008
Date
2007
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Institutt for informasjonssikkerhet og kommunikasjonsteknologi
[2594]
Publikasjoner fra CRIStin - NTNU
[38294]
Original version
Metallization scheme and release methods for fabrication of RF MEMS switches. I: Proceedings of the 33rd Micro- and Nano- Engineering conference (MNE 2007).
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